This presentation is a pictorial guide to the selection and application of measurement methods for defect localization. The presentation covers passive voltage contrast (PVC), nanoprobing, conductive atomic force microscopy, and photon emission microscopy (PEM). It describes signal types, how the measurements are made, the sensing mechanisms involved, and the output that can be expected.

defect localization, electron beam absorbed current, electron beam induced current, optical beam induced resistance change, passive voltage contrast, photon emission microscopy
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2022
ASM International
Topics
Photoemission electron microscopy Atomic force microscopy Semiconductor wafer fabrication Thermoelectric effect Thermography Scanning electron microscopes
Issue Section:
Fault Isolation
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