Power devices are now ubiquitous and integral in control of systems across various sectors of the economy. Silicon-based power devices still dominate in most of the applications although new materials and device architectures are becoming common in the next generation of devices. While several techniques to characterize the overall device properties are necessary, the fundamentals in several of these power devices such as Insulated Gate Bipolar Transistors (IGBTs) still rely on healthy junctions for optimal device performance. The technique of Electron Beam Induced Current (EBIC) is used to examine the depletion zones of the p/n junctions between drift and body regions of the device. Simple sample preparation methods such as cleaving the device allows quick cross-section evaluation of the device structure and electrical characterization using EBIC yields good data. The role of acceleration potential on depletion zone thickness is considered during the analysis of intact die and cross-sections. While low voltage EBIC provides images of the p/n junctions in cross-sections, it is found that high voltage (30 kV) EBIC images can also be used to image these same p/n junctions and therefore may point to a very quick line monitor or means for early failure analysis of these devices.

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