AFM in SEM for Device Characterization and Defect Localization

The results of analyses on a commercially available 7 nm SRAM, using an in-situ AFM inside a SEM, are presented. In addition to typical results for conductive AFM, a novel method is described that uses the SEM beam to prepare a region for additional material removal, thus bringing out clearer electrical data. This would be of exceptional value for technology nodes using cobalt as a contact material. Finally, techniques making use of the current from the SEM beam as the source of current during the measurement are described. The technique may have value for well resistance measurements using in-situ structures on live product, a survey of junction health, or the localization of point defects.