Abstract
Automated TEM lamella preparation using the remote CAD to SEM image alignment has been demonstrated for high volume failure analysis. The proposed method not only provides a secure means of using CAD design data during the lamella prep process, but offers an improved flexibility compared to conventional methods of processing CAD design file in a tool environment. The experiment showed that the new method is 3.1 times higher in throughput and requires 74 times less manhours, compared to manual process.
This content is only available as a PDF.
Copyright © 2022 ASM International. All rights reserved.
2022
ASM International
Issue Section:
FIB Sample Preparation
You do not currently have access to this content.