In-Situ Electrical Biasing of Electrically Connected TEM Lamellae with Embedded Nanodevices

In this paper, we demonstrate with a case study on a nanocapacitor, the capability of transmission electron microscopy in electron holography mode to be a unique in-situ technique for mapping electric fields and charge distributions on a single device. Such precision is necessary to keep pace with shrinking device dimensions and the ever increasing complexity of device architectures.