Automated TEM Workflow for Inline Defect Characterization

This study shows that a high-volume TEM workflow can be achieved for inline defect characterization by adding a defect marking step using commercially available tools. A simple user-assisted defect marking procedure added to a conventional automated ex-situ lift-out TEM workflow increased throughput by a factor of nearly three and reduced man-hours by an order of magnitude, a significant improvement over conventional TEM workflows.