Cell aware diagnosis identifies defects within the standard cell as opposed to traditional layout aware diagnosis that identifies the failing standard cell or the area between two standard cells. In a mature technology dominated by random defects, cell aware results pinpoint the cell internal layer drastically reducing the turnaround time for failure analysis. This paper describes a method to enable cell aware diagnosis in a foundry environment, perform a volume diagnosis analysis with RCAD (fail mode pareto) and drive failure analysis with a quick turnaround time for a 14nm customer chip.

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