OBIRCh(Optical Beam Induced Resistance Change) and TIVA (Thermal Induced Voltage Alteration) are widely used ElectricalFailure Analysis techniques for finding defects under static conditions. This paper will discuss the requirements for a good amplifier to be used for OBIRCh, and recent improvements that have been released to market from Thermo Fisher Scientific.

amplifier, failure analysis, optical beam induced resistance change, thermal induced voltage alteration
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2020
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Poster Session
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