This presentation demonstrates how Time-of-Flight Secondary Ion Mass Spectroscopy provides unique information to identify suspect counterfeit semiconductor devices. An example is shown where the epitaxial layers of a light emitting device (LED) do not match those of the exemplar.

Keywords: Secondary Ion Mass Spectroscopy, SIMS, counterfeit detection, LED, Light emitting diode.

counterfeit semiconductor devices, light emitting diode, time-of-flight secondary ion mass spectroscopy
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Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Topics
Power semiconductor devices Semiconductor wafer fabrication Time-of-flight secondary ion mass spectrometry
Issue Section:
Counterfeit Microelectronics
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