Abstract
This presentation demonstrates how Time-of-Flight Secondary Ion Mass Spectroscopy provides unique information to identify suspect counterfeit semiconductor devices. An example is shown where the epitaxial layers of a light emitting device (LED) do not match those of the exemplar.
Keywords: Secondary Ion Mass Spectroscopy, SIMS, counterfeit detection, LED, Light emitting diode.
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Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Issue Section:
Counterfeit Microelectronics
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