Abstract
This paper introduces a novel sample preparation method using plasma focused ion-beam (pFIB) milling at low grazing angle. Efficient and high precision preparation of site-specific cross-sectional samples with minimal alternation of device parameters can be achieved with this method. It offers the capability of acquiring a range of electrical characteristic signals from specific sites on the cross-section of devices, including imaging of junctions, Fins in the FinFETs and electrical probing of interconnect metal traces.
This content is only available as a PDF.
Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Issue Section:
Sample Preparation and Deprocessing
You do not currently have access to this content.