Electron Beam Induced Current is a powerful tool for Scanning Electron Microscopy (SEM) imaging mode. In this paper, the history and evolution of this technique are discussed. Some important defects are presented as well as their technological interpretation. A new custom amplifier is presented and its implementation in Time Resolved EBIC (TREBIC) is also proposed, the main differences with EBIC are pointed out.

electron beam induced current, failure analysis, scanning electron microscopy
This content is only available as a PDF.
Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Microscopy
You do not currently have access to this content.