Abstract

GHz-SAM using toneburst transducers is a method currently lacking the possibility to measure warped samples easily because large parts of such samples are out of focus due to the limited depth of focus of these types of transducers. This paper shows an approach to use the already established HiSA (High Speed Axis) method to overcome this disadvantage. Therefore warpage of the sample is measured by a white-light interferometer. The detected bow is parametrized and submitted in the control electronics of the HiSA. With this data the HiSA is enabled to keep the distance between sample and transducer precisely constant. This allows eliminating the influence of the warpage on the performance of this method and therefore highly increases the image quality.

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