Abstract
On mechanically polished cross-sections, getting a surface adequate for high-resolution imaging is sometimes beyond the analyst’s ability, due to material smearing, chipping, polishing media chemical attack, etc.. A method has been developed to enable the focused ion beam (FIB) to re-face the section block and achieve a surface that can be imaged at high resolution in the scanning electron microscope (SEM).
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Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Issue Section:
Focused Ion Beam Sample Preparation
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