Multipurpose sample holder for advanced Transmission Electron Microscopy (TEM) sample preparation which reduces cost of the tool and most importantly simplifies the workflow is introduced. Following the current demand for user-friendly interface, semi-automated approach is aimed to be build up. Abilities to prepare advanced TEM lamellae in various geometries without rotary nanomanipulator and using various end-point detection signals are perceived as biggest advantages of this design.

lamellae, sample preparation, transmission electron microscopy
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Copyright © 2019 ASM International. All rights reserved.
2019
ASM International
Topics
Specimen preparation Transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Focused Ion Beam Sample Preparation
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