Nanoprobing and EBAC for Improving Failure Analysis Success Rates on Sub-14nm Logic and SRAM

Nanoprobing, electrical probing (DC electrical measurement of semiconductors using nanoscale probes) on an electron microscopic scale, and EBAC, a high-resolution, static technique, can be used for isolating defects and improving failure analysis success rates on both logic and SRAM devices. This paper presents three case studies of subtle defects on a technology beyond 14nm that required nanoprobing.