Vacuum assisted ex situ lift out may be used for fast, easy, and reproducible plan view specimen preparation. Manipulation of samples via beveled hollow glass probes whose plane of interest is parallel to slotted grids allow for conventional FIB milling for S/TEM analysis.

conventional FIB milling, plan view specimen preparation, S/TEM analysis, vacuum assisted ex situ lift out
This content is only available as a PDF.
Copyright © 2018 ASM International. All rights reserved.
2018
ASM International
Topics
Specimen preparation Scanning transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Focused Ion Beam Sample Preparation
You do not currently have access to this content.