Secondary electron detector (SED) plays a vital role in a focused ion beam (FIB) system. A successful circuit edit requires a good effective detector. Novel approach is presented in this paper to improve the performance of such a detector, making circuit altering for the most advanced integrated circuit (IC) possible.

advanced integrated circuit, circuit altering, focused ion beam system, secondary electron detector
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Copyright © 2018 ASM International. All rights reserved.
2018
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Focused Ion Beam Analysis and Circuit Edit
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