In recent years, laser reflectance modulation measurements are widely used in failure analysis. Among them, EOFM (Electron-Optical Frequency Mapping) technique is easy to operate and very practical. In this article, some images with abnormal EOFM phenomena and their corresponding defects are showing up, the causes of those abnormal EOFM phenomena are also pointed out. They prove that EOFM function is very effective for discovering open or high-impedance defects on metal trace and pinpointing short-circuit defects. In addition to the two aspects above, there are also some abnormal EOFM phenomena we couldn’t explain perfectly. We studied one of them and proposed two possible causes of the anomaly. After simulation experiment and calculation, it could be basically determined that the abnormal EOFM phenomenon was caused by the substrate noise current.

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