Abstract

In this paper, a workflow consisting of a pico-second laser tool followed by a broad argon beam tool is proposed as a solution for extremely large area preparation with surfaces suitable for SEM and FIB based analysis directly after polishing in the broad argon beam tool. Results are presented discussing the advantages of this workflow in terms of speed, size and quality of the surface for electron microscopy analysis. The use of the broad argon beam tool to complete the process produces near perfect interfaces especially compared to mechanical preparation techniques on the multilayers with vastly different properties found in advanced packages. Additionally, the tool can be used for backside thinning and reducing front side delayering.

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