Abstract

In transmission electron microscopy (TEM), one typically considers bright-field or dark-field imaging signals, which utilize the transmitted and scattered electrons, respectively. Analytical signals such as characteristic X-Rays or primary electron beam energy losses from inelastic scattering events give rise to the energy dispersive X-Ray spectroscopy and electron energy loss spectroscopy techniques, respectively. In this paper, the detection of the electron beam absorbed current (EBAC) and electron beam induced current (EBIC) signals is reported using a specially designed scanning TEM holder and associated amplification electronics. By utilizing thin TEM samples where the beam-sample interaction volume is controlled more through the incident electron probe size, the EBAC and EBIC signal resolution is improved to the point where implant regions and Schottky junction depletion zones can be visualized.

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