High Throughput Phase Mapping for Metrology Using Low-Loss EELS Available to Purchase

The plasmon-loss region of the low-loss electron energy loss spectroscopy (EELS) contains chemical information similar to core-loss EELS; therefore it can be utilized as finger-printing elements. A high throughput phase mapping technique based on plasmon energy (Ep) is proposed. We have successfully applied this phase mapping technique into two case studies in our magnetic head manufacturer processes. This Ep phase mapping can be applied to not only the data storage but also semiconductor industries.