We present here the development of a system that allows for in-situ studies inside the Transmission Electron Microscope (TEM). Functionalized Microelectromechanical Systems (MEMS) used as sample carriers, referred to as Nano-Chips, contain up to eight electrodes used for simultaneous biasing and heating purposes, enabling electro-thermal characterization of various sample types inside the TEM under real life dynamic conditions. This operando approach is an ideal method to study failure analysis of semiconductor materials, performance of resistive switching devices, batteries, fuel cells, piezoceramics and many more.

batteries, failure analysis, fuel cells, microelectromechanical systems, nanochips, piezoceramics, resistive switching devices, semiconductor materials, transmission electron microscope
This content is only available as a PDF.
Copyright © 2017 ASM International. All rights reserved.
2017
ASM International
Topics
Transmission electron microscopy Semiconductor wafer fabrication Test method evaluation
Issue Section:
Microscopy
You do not currently have access to this content.