To characterize materials or devices in the next generation cutting-edge technologies, it is becoming more essential to carry out comprehensive characterization of the samples with a system that can provide a wealth of various contrast information. By analyzing the different signals detected at different angular scattering distribution, it can reveal tremendous information from the samples. Coupled with the superior detection capability, we have demonstrated the capability to enhance the fault isolation methodology of memory devices or media grain size analysis by optimizing various parameter settings. The effects of conditions (accelerating voltage, working distance, detector, probe current etc.) that can influence the trajectory pathways or yield of the different emitted signals would be discussed in the paper.