We present an upgraded time-resolved LADA system, with a 25ps pulsed laser, integrated into a commercial laser scanning microscope used in failure analysis. We demonstrate the use of this system on 14nm/16nm finfet devices.

failure analysis, finFET devices, laser scanning microscope, pulsed lasers, solid immersion lens, time resolved laser-assisted device alteration
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Copyright © 2017 ASM International. All rights reserved.
2017
ASM International
Topics
Semiconductor wafer fabrication Microscopes
Issue Section:
Fault Isolation and Defect Localization
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