Abstract
High speed FIB cross-sectioning of polyimide material was traditionally very difficult because of artifacts created by FIB on the cross section plane. Therefore we propose a simple method, which retains the high speed of the FIB process, but significantly improves the quality of the cross section plane. The method involves a hard mask positioned close to the intended place of the cross section using a precise manipulator. This then enables highly accurate and site-specific FIB cross-sectioning. Cross sections can be made very quickly and with the excellent quality in comparison to standard procedures based on gas-assisted deposition of a protection layer.
This content is only available as a PDF.
Copyright © 2016 ASM International. All rights reserved.
2016
ASM International
Issue Section:
Package Level Failure Analysis
You do not currently have access to this content.