Abstract
Prior to x-ray tomography, cylindrically-shaped samples are obtained using an innovative milling strategy on a Plasma-FIB. The method presented consists of tuning the ion dose as a function of pixel coordinates along with optimization of the scan geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency.
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Copyright © 2016 ASM International. All rights reserved.
2016
ASM International
Issue Section:
Sample Preparation
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