Time-resolved laser assisted device alteration (TR-LADA) has interesting applications to reduce the spatial spread of LADA site, as well as benefit device design debug. This paper describes an implementation using a 1063nm wavelength nanosecond pulse-on-demand laser diode to obtain a timing resolution of 1-2 tester cycles and spatial resolution enhancements to LADA sites. We also present potential capabilities of TR-LADA in the debug of analog circuitry.

analog circuits, failure analysis, laser diodes, semiconductor design debugging, semiconductor devices, time-resolved laser assisted device alteration
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Copyright © 2016 ASM International. All rights reserved.
2016
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Test, Diagnostics, and Yield Enhancement
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