Abstract
This paper outlines the physical analysis approach to investigate droplet-like copper discoloration defects. These defects are proven to be caused by differences in copper oxidation based on quantification results of the CuO and Cu2O chemical states using X-ray photoelectron spectroscopy (XPS) analysis.
This content is only available as a PDF.
Copyright © 2016 ASM International. All rights reserved.
2016
ASM International
Issue Section:
Microscopy
You do not currently have access to this content.