A failure analysis work flow is presented demonstrating dislocation visualization, site isolation, TEM lamella preparation and defect characterization. A novel beam control technique allows visualizing dislocations with significantly improved spatial resolution in SEM using Electron Channeling Contrast Imaging. Site-specific TEM preparation on dislocations is therefore possible. The prepared thin lamella can be inspected in the SEM using STEM to study dislocations. This is a cost effective work flow without using TEM.

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