Multiple emission microscopy can be used to obtain a comprehensive overview of device emission during IDDQ-test. In this new approach an emission microscopy image is taken for each pattern of the IDDQ-test. Then the extensive amount of images is analyzed for correlation with IDDQ current levels. As a result, for each increased current level concurrent spots can be identified and further analyzed.

This content is only available as a PDF.
You do not currently have access to this content.