Abstract
Due to the decreasing metal line size on complicated integrated circuit, non-destructive analysis strategy such as EMMI (Emission Microscope) is very significant to failure analysis, especially when special cold temperature failures are encountered. When combined with efficient schematic and layout analysis, the real defect can be localized without much microprobe work.
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Copyright © 2015 ASM International. All rights reserved.
2015
ASM International
Issue Section:
Poster Session
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