As semiconductor device scaling continues to reduce the structure size, device geometries are also changing to three dimensional structures such as finFETs, and the materials which compose the devices are also evolving to obtain additional device performance gains. The material change studied in this paper is the introduction of silicon germanium into the electrically active region of a finFET test structure. The paper demonstrates a quantitative energy dispersive X-ray spectroscopy transmission electron microscopy (TEM) technique through the use of blanket film calibration samples of known concentration characterized by X-ray diffraction. The technique is used to identify a test structure issue which could only be diagnosed with a technique having nanometer spatial resolution and atomic percent sensitivity. The results of the test structure analysis are independently verified by the complementary TEM electron energy loss spectroscopy technique.