Abstract

In this paper, three productive polishing transmission electron microscopy (TEM) sample preparation methods are reported. The methods are studied to improve the efficiency and expand the application fields. Method 1 and 2 address expanding conventional polishing method application on same or similar pattern samples. Method 1 used a laser mark to identify one of the sample; and method 2 used a Pt coated glass inserted between samples or a direct deposition of Pt on one of the samples. Method 3 was developed facilitate stacking three or more samples into a single, batch process block and improved the efficiency greatly.

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