Abstract

As semiconductor technology continues to advance to smaller dimensions and more complex circuit designs, it is becoming more challenging to locate the resistive short directly between two metal lines (signals) due to a metal bridge defect. Especially these two metal lines are very long and relevant to many functional modules. After studying the failed circuit model, we found there should be a tiny leakage between one of the bridged signals and one of common power signals (such as VDD and GND) on a failed IC compared with the reference one, if there is a metal bridge defect between these two bridged signals. The tiny leakage between one of the bridged signals and one of power signals is an indirect leakage that is a mapping of the direct resistive short between these two bridged signals. The metal bridge defect could be pinpointed with the tiny leakage between one of the bridged signals and one of power signals by Lock-in IR-OBIRCH. It is an easier and faster way to locate the metal bridge defects. In this paper, the basic and simple circuit model with a metal bridge defect will be presented and two cases will be studied to demonstrate how to localize a metal bridge defect by the tiny leakage between one of the bridged signals and one of power signals.

This content is only available as a PDF.
You do not currently have access to this content.