Laser-voltage probing (LVP) and imaging (LVI) using a continuous-wave (CW) 1320-1340nm laser have become mainstream techniques for electrical fault isolation. A 1064nm laser with a 20% shorter wavelength offers immediate resolution advantages compared to 1320nm at a cost of increased intrusion. This paper explores the potential of CW 1064nm laser and identifies opportunities in fault isolation

continuous wave laser, failure analysis, fault isolation, laser voltage imaging, laser voltage probing
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Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Poster Session
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