The case study in this paper describes how collaboration between customer design and test teams and a thorough FAB investigation triggered by a detailed electrical analysis using the Atomic Force Nanoprober (AFP) resulted in the effective resolution of a challenging implant related issue on LDMOS structure that caused yield loss. The quick success in this case has led to a shorter yield ramp cycle on this new product for mass production.

atomic force nanoprober, electrical analysis, failure analysis, LDMOS
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Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Power semiconductor devices Atomic force microscopy Semiconductor wafer fabrication
Issue Section:
Poster Session
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