Dynamic Laser Stimulation (DLS) technique have met with great success over the past few years in helping failure analysis engineer to tackle different type of soft failures. DLS is widely applied to devices presenting an abnormal behavior for any electrical parameter, such as operating voltage and frequency. This paper showcase another successful implementation of DLS technique, combined with design analysis to reveal the root cause for SRAM soft failure.

design debugging, dynamic laser stimulation, failure analysis, root cause analysis, soft defect localization, SRAM
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Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Semiconductor wafer fabrication Root cause analysis
Issue Section:
Poster Session
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