Ex situ lift out (EXLO) was historically the first lift out technique to be developed for site specific removal and manipulation of focused ion beam (FIB)-prepared specimens to a suitable carrier. In this paper, fast plasma FIB (PFIB) preparation of large scanning/transmission electron microscope specimens is combined with fast conventional EXLO and EXpressLO "pick and place" solutions. The combination of large material removal rates with PFIB and EXLO allows for efficiency and high throughput of FIB lift out specimens.

failure analysis, focused ion beam, scanning electron microscope, specimen preparation, transmission electron microscope
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Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Specimen preparation Scanning electron microscopy Transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Sample Preparation and Deprocessing
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