Abstract

A Plasma-source focused ion beam (Helios PFIB) DualBeam™ microscope with sub-nanometer 1kV SEM resolution was used to investigate the structure of a state-ofthe- art organic light-emitting diode (OLED) display. The capability of the Helios PFIB to produce and manipulate millimeter-scale samples for wide field-of-view crosssectional SEM analyses was demonstrated by lifting out a 570ìm long by 40ìm wide x 10ìm deep and mounting it on a copper half-grid. An angled face was cut into the chunk and high-resolution back-scattered SEM tiles across the entire exposed face were automatically acquired within a modular automated processing system (MAPS).

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