Abstract

This paper places a strong emphasis on the importance of applying Systematic Problem Solving approach and use of appropriate FA methods and tools to understand the “real” failure root cause. A case of wafer center cluster RAM fail due to systematic missing Cu was studied. It was through a strong “inquisitive” mindset coupled with deep dive problem solving that lead to uncover the actual root cause of large Cu voids. The missing Cu was due to large Cu void induced by galvanic effects from the faster removal rate during Cu CMP and subsequently resulted in missing Cu. This highlights that the FA analyst’s mission is not simply to find defects but also play a catalyst role in root cause/failure mechanism understanding by providing supporting FA evidence (electrically/ physically) to Fab.

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