The Rotation Averaged Spectrum of TEM diffraction patterns can be sharpened by a Maximum-Likelihood deconvolution algorithm. The sharpened spectrum will help to improve the precision of TEM diffraction-based techniques, e.g.: phase identification and strain analysis.

failure analysis, maximum-likelihood deconvolution, precision, spectrum sharpening, transmission electron microscopy
This content is only available as a PDF.
Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Microscopy
You do not currently have access to this content.