Abstract
By adding a transmission grating into the optical path of our photon emission system and after calibration, we have completed several failure analysis case studies. In some cases, additional information on the emission sites is provided, as well as understanding of the behavior of transistors that are associated to the fail site. The main application of the setup is used for finding and differentiating easily related emission spots without advance knowledge in light emission mechanisms in integrated circuits.
This content is only available as a PDF.
Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Issue Section:
Photon Based Techniques
You do not currently have access to this content.