The application of lockin phase mapping of modulated reflectance with SIL is discussed in detail, particularly the socalled ghost mapping signal in STI neighboring to active regions. The different lockin phase between active regions and ghost regions showed clearly that both of them have different physical origins. The phase transition between active regions provides an enhancement of spatial resolution for defect localization in scan cell and sub blocks.c

failure analysis, fault localization, lock-in phase mapping, phase transition, scan cells, solid immersion lens
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Copyright © 2014 ASM International. All rights reserved.
2014
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Photon Based Techniques
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