Micro-Abrasive Blasting—A Novel Approach to Local Silicon and Mold Compound Material Removal

Post silicon validation techniques on Integrated Circuits (IC) specifically FIB circuit editing require backside sample preparation done by local mold compound and silicon machining. Conventional methods such as Computer Numerically Controlled (CNC) machining and chemical etching preparation platforms are commonly used. This paper will investigate a simple alternative approach to local sample preparation by using micro-abrasive blasting. This approach will display its simple natured set-up along with extremely quick process duration.