Abstract
This paper presents a case study on reliability reject on a Freescale mixed-mode IC. It focuses on a novel use of one of most frequently used failure localization techniques: static emission microscopy (EMMI) to localize a failure due to an electrical transient behavior. This work helped Freescale to identify a wafer fab process limitation and contributed to test improvement.
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Copyright © 2013 ASM International. All rights reserved.
2013
ASM International
Issue Section:
Poster Session
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