This paper presents a case study on photon emission from metals and demonstrates the capability of Emission Microscopy Si-CCD camera to detect micro metal bridges on functional failures of Analog devices.

analog devices, charge-coupled devices, emission microscopy, failure analysis, fault localization, silicon
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Copyright © 2013 ASM International. All rights reserved.
2013
ASM International
Topics
Microscopy Metallization Silicon
Issue Section:
Photon Based Techniques
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