Microsystems-enabled photovoltaics (MEPVs) are microfabricated arrays of thin and efficient solar cells. The scaling effects enabled by this technique results in great potential to meet increasing demands for light-weight photovoltaic solutions with high power density. This paper covers failure analysis techniques used to support the development of MEPVs with a focus on the laser beam-based methods of LIVA, TIVA, OBIC, and SEI. Each FA technique is useful in different situations, and the examples in this paper show the relative advantages of each method for the failure analysis of MEPVs.

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