Abstract

This paper describes 2 case studies where device characterizations using Atomic Force Probe (AFP) nanoprobing, allow for the localization and verification of design weakness and process variations on the Analog-to-Digital (ADC) block that resulted in degraded device performance and severe yield loss. In these cases, the sensitive resistor structures in the ADC block was impacted due to design pattern density interaction with process fabrication steps. In addition, close collaboration with customer was also essential for quick root cause identification, design and process fix.

This content is only available as a PDF.
You do not currently have access to this content.