The Nanoprobing technique has become a popular tool for the Failure Analysis. This paper tries to establish the fundamental postulates for the following improvement of the technique. After description of the postulates, the application to missing or blocked LDD is claimed. Meanwhile, the following strategy of post-Nanoprobing is discussed by the case of missing LDD and for general conditions.

failure analysis, lightly doped drain, nanoprobing, semiconductor devices
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Copyright © 2013 ASM International. All rights reserved.
2013
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Nanoprobing
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