In this paper, we present a Superconducting Nanowire Single Photon Detector (SnSPD) system and its application to ultra low voltage Time-Resolved Emission (TRE) measurements (also known as Picosecond Imaging Circuit Analysis, PICA) of scaled VLSI circuits. The 9 µm-diameter detector is housed in a closed loop cryostat and fiber coupled to an existing Emiscope III tool for collecting spontaneous emission light from the backside of integrated circuits (ICs) down to a world record 0.5 V supply voltage in a few minutes.

failure analysis, superconducting nanowire single photon detectors, time-resolved emission measurements, VLSI circuits
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Copyright © 2013 ASM International. All rights reserved.
2013
ASM International
Topics
Semiconductor wafer fabrication Test method evaluation
Issue Section:
Advanced Techniques
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